JPS6433566U - - Google Patents
Info
- Publication number
- JPS6433566U JPS6433566U JP12686487U JP12686487U JPS6433566U JP S6433566 U JPS6433566 U JP S6433566U JP 12686487 U JP12686487 U JP 12686487U JP 12686487 U JP12686487 U JP 12686487U JP S6433566 U JPS6433566 U JP S6433566U
- Authority
- JP
- Japan
- Prior art keywords
- butterfly valve
- flow rate
- pressure regulating
- regulating device
- rate control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12686487U JPS6433566U (en]) | 1987-08-19 | 1987-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12686487U JPS6433566U (en]) | 1987-08-19 | 1987-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6433566U true JPS6433566U (en]) | 1989-03-01 |
Family
ID=31378771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12686487U Pending JPS6433566U (en]) | 1987-08-19 | 1987-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6433566U (en]) |
-
1987
- 1987-08-19 JP JP12686487U patent/JPS6433566U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6433566U (en]) | ||
| JPH01120942U (en]) | ||
| JPH01156739U (en]) | ||
| JPS60122360U (ja) | スパツタリング装置 | |
| JPS5870229U (ja) | エア−圧力調整装置 | |
| JPS61106024U (en]) | ||
| JPS62170629U (en]) | ||
| JPS6198868U (en]) | ||
| JPS6072963U (ja) | 気体燃料供給装置 | |
| JPH01167035U (en]) | ||
| JPH03115663U (en]) | ||
| JPS60104310U (ja) | ダンパ駆動装置 | |
| JPS5920078U (ja) | 制御弁 | |
| JPH0422035U (en]) | ||
| JPS5930527U (ja) | 排出ガス制御用負圧制御バルブ | |
| JPS5844231U (ja) | 負圧アクチユエ−タを用いた定速走行装置 | |
| JPS5870570U (ja) | ガス圧調整器付電磁弁装置 | |
| JPS60170063U (ja) | 燃料弁開弁圧切換装置 | |
| JPS63147813U (en]) | ||
| JPS6390830U (en]) | ||
| JPH01180250U (en]) | ||
| JPS58150108U (ja) | 液相圧力調整器 | |
| JPS6439510U (en]) | ||
| JPS6449675U (en]) | ||
| JPS59165013U (ja) | ガス調圧装置 |